基于热对流的闭环微机械加速度计

2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) Pub Date : 2011-05-11 DOI:10.1049/MNL.2012.0702

A. Garraud, P. Combette, B. Charlot, P. Loisel, A. Giani

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引用次数: 12

摘要

在这项工作中，我们提出了基于对流的微机械热加速度计的频率分析。首先引入开环框图表示来解释传感器的行为。设想新的传感器结构，以提高传感器的特性:一个闭环配置是通过增加两个电阻关闭检测器。研究了对热敏度和带宽的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A closed-loop micromachined accelerometer based on thermal convection

In this work, we present the frequency analysis of a micromachined thermal accelerometer based on convection. Open-loop block diagram representation is first introduced to explain the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics: a closed-loop configuration is designed by addition of two resistors closed to detectors. Effects on thermal sensitivity and bandwidth are investigated.

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来源期刊

2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)

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