ddprobe:自传感AFM型纳米探针

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2016-07-18 DOI:10.1109/IPFA.2016.7564283

R. Shioda, Y. Amano, K. Ikezawa, Y. Nakamura, T. Kasahara

{"title":"ddprobe:自传感AFM型纳米探针","authors":"R. Shioda, Y. Amano, K. Ikezawa, Y. Nakamura, T. Kasahara","doi":"10.1109/IPFA.2016.7564283","DOIUrl":null,"url":null,"abstract":"Nano-prober has the increasing importance for advanced semiconductor device process. Conventional SEM type Nano-prober face the problems, device degradation with electron bombardment and resolution limit. The AFM Nano-prober can work in air, so it is so easy to use for its operation. We report the new type AFM Nano-prober that applied the self-sensing type AFM. This method has the simple structure and easy to use. In the case of Nano-prober that constructed with multiple AFM, this simple method is best choice in this purpose.","PeriodicalId":206237,"journal":{"name":"2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"DdProber: Self-sensing AFM type Nano-prober\",\"authors\":\"R. Shioda, Y. Amano, K. Ikezawa, Y. Nakamura, T. Kasahara\",\"doi\":\"10.1109/IPFA.2016.7564283\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nano-prober has the increasing importance for advanced semiconductor device process. Conventional SEM type Nano-prober face the problems, device degradation with electron bombardment and resolution limit. The AFM Nano-prober can work in air, so it is so easy to use for its operation. We report the new type AFM Nano-prober that applied the self-sensing type AFM. This method has the simple structure and easy to use. In the case of Nano-prober that constructed with multiple AFM, this simple method is best choice in this purpose.\",\"PeriodicalId\":206237,\"journal\":{\"name\":\"2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"volume\":\"85 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA.2016.7564283\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2016.7564283","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

纳米探针在先进半导体器件工艺中发挥着越来越重要的作用。传统的SEM型纳米探针面临着电子轰击导致器件退化和分辨率限制等问题。AFM纳米探针可以在空气中工作，因此它的操作非常简单。本文报道了一种应用自传感型原子力显微镜的新型原子力显微镜纳米探针。该方法结构简单，使用方便。对于由多个原子力显微镜组成的纳米探针，这种简单的方法是最佳选择。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

DdProber: Self-sensing AFM type Nano-prober

Nano-prober has the increasing importance for advanced semiconductor device process. Conventional SEM type Nano-prober face the problems, device degradation with electron bombardment and resolution limit. The AFM Nano-prober can work in air, so it is so easy to use for its operation. We report the new type AFM Nano-prober that applied the self-sensing type AFM. This method has the simple structure and easy to use. In the case of Nano-prober that constructed with multiple AFM, this simple method is best choice in this purpose.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

自引率

0.00%

发文量