大功率mcm用CVD金刚石膜沉

Kuojun Xie, Changshun Jiang, Haifeng Xu, Lin Zhu
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引用次数: 2

摘要

随着电子封装变得更加紧凑,运行速度更快,散热更多,封装设计师需要更有效的热管理材料。CVD金刚石由于其高导热性、低介电损耗和高机械强度,是下一代紧凑型高速计算机和高功率微波元件中三维(3-D)多芯片模块(mcm)的优良材料。本文合成了大面积独立式金刚石薄膜和衬底,并对金刚石衬底进行了抛光处理,使mcm金刚石薄膜沉降成为现实。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
CVD diamond film sink for high power MCMs
As electronic packages become more compact, run at faster speeds and dissipate more heat, package designers need more effective thermal management materials. CVD Diamond, because of its high thermal conductivity, low dielectric loss and its great mechanical strength, is an excellent material for three dimensional (3-D) multichip modules (MCMs) in the next generation compact, high speed computers and high power microwave components. In this paper, we have synthesized a large area free-standing diamond films and substrates, and polished diamond substrates, which make MCMs diamond film sink becomes a reality.
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