{"title":"大功率mcm用CVD金刚石膜沉","authors":"Kuojun Xie, Changshun Jiang, Haifeng Xu, Lin Zhu","doi":"10.1109/ICEPT.2005.1564611","DOIUrl":null,"url":null,"abstract":"As electronic packages become more compact, run at faster speeds and dissipate more heat, package designers need more effective thermal management materials. CVD Diamond, because of its high thermal conductivity, low dielectric loss and its great mechanical strength, is an excellent material for three dimensional (3-D) multichip modules (MCMs) in the next generation compact, high speed computers and high power microwave components. In this paper, we have synthesized a large area free-standing diamond films and substrates, and polished diamond substrates, which make MCMs diamond film sink becomes a reality.","PeriodicalId":234537,"journal":{"name":"2005 6th International Conference on Electronic Packaging Technology","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"CVD diamond film sink for high power MCMs\",\"authors\":\"Kuojun Xie, Changshun Jiang, Haifeng Xu, Lin Zhu\",\"doi\":\"10.1109/ICEPT.2005.1564611\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As electronic packages become more compact, run at faster speeds and dissipate more heat, package designers need more effective thermal management materials. CVD Diamond, because of its high thermal conductivity, low dielectric loss and its great mechanical strength, is an excellent material for three dimensional (3-D) multichip modules (MCMs) in the next generation compact, high speed computers and high power microwave components. In this paper, we have synthesized a large area free-standing diamond films and substrates, and polished diamond substrates, which make MCMs diamond film sink becomes a reality.\",\"PeriodicalId\":234537,\"journal\":{\"name\":\"2005 6th International Conference on Electronic Packaging Technology\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-08-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 6th International Conference on Electronic Packaging Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEPT.2005.1564611\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 6th International Conference on Electronic Packaging Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT.2005.1564611","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
As electronic packages become more compact, run at faster speeds and dissipate more heat, package designers need more effective thermal management materials. CVD Diamond, because of its high thermal conductivity, low dielectric loss and its great mechanical strength, is an excellent material for three dimensional (3-D) multichip modules (MCMs) in the next generation compact, high speed computers and high power microwave components. In this paper, we have synthesized a large area free-standing diamond films and substrates, and polished diamond substrates, which make MCMs diamond film sink becomes a reality.