用于光学封装的精密倒装凸点焊料互连

B. Imler, K. Scholz, M. Cobarruviaz, R. Haitz, V. K. Nagesh, C. Chao
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引用次数: 24

摘要

凸点倒装芯片技术特别适用于各种器件的封装,例如细间距LED(发光二极管)阵列电子照相打印头,其优点是精确对准,高电互连密度,紧密的模具放置和低成本。研究了这种阵列的制造可行性,特别强调了与焊料凹凸键合相关的表面张力诱导自对准的质量。采用75 μ m直径制作了一组LED二极管阵列芯片。焊料凸起在156亩间距。芯片面朝下,边沿间隔15亩,放置在金属化薄膜图案的玻璃基板上。X-Y平面的芯片-衬底对准误差小于1.5 μ m,标准偏差小于1.0 μ m,远低于标准机械对准方法的典型误差10-15 μ m。还观察到光输出均匀性的改善和用传统的模具放置和金属丝键合制造的阵列上散射光的减少。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Precision flip-chip solder bump interconnects for optical packaging
Solder bump flip chip technology is particularly well suited to the packaging of classes of devices, such as fine pitch LED (light emitting diode) array electrophotographic print heads, which place premiums on precision alignment, high electric interconnect density, close die placement, and low cost. The manufacturing feasibility of such an array was investigated, with particular emphasis on the quality of surface tension induced self-alignment associated with solder bump bonding. An array of LED diode array chips was fabricated employing 75 mu -dia. solder bumps on 156 mu m pitch. The chips were spaced 15 mu edge-to-edge, face down, on a glass substrate patterned with thin film metallization. Chip-to-substrate alignment errors in the X-Y plane were found to be under 1.5 mu m with a standard deviation of under 1.0 mu m, well below the 10-15 mu m error typical of the standard mechanical alignment method. Improvements in light output uniformity and a reduction in scattered light over arrays manufactured with conventional die placement and wire bonding were also observed.<>
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