IntelliSuite®EMagAnalysis:真实变形结构的s参数提取工具

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352031

Fangyuan Xu, Shan-Liang Zhang, Lei Zhou, Bo Xu

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引用次数: 0

摘要

本文讨论了结合IntelliSuitereg EMagAnalysis和IntelliSuitereg TEMAnalysis提取实际变形MEMS器件s参数的方法，并利用了这两个分析模块的数据结构兼容性。通过本文提出的新方法，在分析射频开关经典结构时得到了更精确的结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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IntelliSuite® EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures

This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data structure compatibility of these two analysis modules. Through this novel method that has been developed, more accurate results are gotten when analyzing a classical structure of RF switch.

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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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