晶圆级底填处理

L. Nguyen, C. Quentin, Phuong Nguyen
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引用次数: 0

摘要

下填材料对倒装芯片封装的可靠性起着重要作用。这些胶粘剂在过去几年中一直是研究和开发的主题,并且在材料性能方面取得了很大的改进。然而,组装方法仍然保持不变,在倒装芯片回流后在单个芯片水平上分配下填料。即使有了“无流”的下填料,组装仍然需要在定位倒装芯片模具之前将下填料沉积到倒装芯片上。在晶圆级处理下填充带来了一个新的范式转移到倒装芯片封装领域。用底填料预涂硅片将大大节省时间和金钱。晶圆级工艺的应用周期时间相当于对晶圆上所有好的模具进行一次点胶操作。本文将介绍丝网印刷作为晶圆级工艺的应用方法所获得的结果。在未碰撞的硅片上印刷实验底填料并固化,并对所得到的薄膜进行了分析。评价了影响膜厚和表面粗糙度的工艺条件。讨论了凹凸硅片的初步结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wafer Level Underfill Processing
Underfill materials play a major role in the reliability of flip chip packages. These adhesives have been the subject of much research and development in the last few years, and much improvement in material performance has been obtained. However, the assembly method still remains unchanged, with the underfill being dispensed at the individual die level after flip chip reflow. Even with the arrival of “no-flow” underfills, assembly still requires depositing the underfill material onto the flip chip site prior to positioning the flip chip die. Processing underfill at the wafer level brings in a new paradigm shift to the area of flip chip packaging. Precoating the wafer with the underfill will create significant savings in both time and money. The application cycle time of the wafer level process becomes equivalent to a single dispensing operation for all the good dies on the wafer. This paper will present results obtained with screen printing used as the application method for the wafer level process. An experimental underfill was printed onto un-bumped silicon wafers and cured, and the resultant films were analyzed. Process conditions affecting film thickness and surface roughness were evaluated. Preliminary results with bumped wafers are also discussed.
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