极短的TAT ULSI试验生产线建设

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) Pub Date : 1997-10-06 DOI:10.1109/ISSM.1997.664610

S. Kato, T. Suzuki, K. Yamazaki, M. Nakamura

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引用次数: 0

摘要

LSI制造部门生产领先的试验产品，以支持NEC的半导体业务。随着大规模集成电路设计规则的迅速细化，缩短周转时间(TAT)正成为一个重要的主题，以创造新产品尽可能快。在这种情况下，我们建立了一个基于全面生产维护(TPM)的改进系统，以实现100%的客户满意度，优先考虑非常短的TAT和首次运行的成功。

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Very short TAT ULSI trial manufacturing line construction

The LSI manufacturing division manufactures leading-edge trial products to support the semiconductor business of NEC. As LSI design rules are rapidly becoming finer, short turn-around time (TAT) is becoming an important subject in order to create new products as quickly as possible. Under these circumstances, we established a system of improvement based on total productive maintenance (TPM) to achieve 100% customer satisfaction, with priority on very short TAT and success on the first run.

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来源期刊

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)

CiteScore

0.80

自引率

0.00%

发文量