弹性黏着MEMS接触的静摩擦，模型和实验

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838515

N. Tas, C. Gui, M. Elwenspoek

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引用次数: 20

摘要

剪切模式下的静摩擦可以表示为界面抗剪强度与实际接触面积的乘积。分析了弹性粘接接触中粗糙度对摩擦的影响。特别要注意的是低负荷条件，在这种情况下接触点的数量很少。利用该模型对MEMS摩擦计中的摩擦实验进行了分析。

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Static friction in elastic adhesive MEMS contacts, models and experiment

Static friction in shearing mode can be expressed as the product of the shear strength of the interface and the real contact area. The influence of roughness on friction in elastic adhesive contact is analyzed. Special attention is paid to low loading conditions, in which the number of contact points is small. The models are used to analyze a friction experiment in a MEMS friction meter.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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