利用纯白噪声确定MEMS振动能量采集器驻极体电荷势的方法

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2019-03-01 DOI:10.1109/ICMTS.2019.8730995

H. Mitsuya, H. Ashizawa, H. Homma, G. Hashiguchi, H. Toshiyoshi

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引用次数: 3

摘要

提出了一种高通量测量MEMS振动能量采集器驻极体电势的方法。当驻极体器件被白噪声电压电激励时，叠加的直流偏置电压补偿驻极体电位，从而知道驻极体电位的大小，从而使机械共振从实时FFT分析中消失。

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A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester using Pure White Noise

A high-throughput measurement method is developed to determine the electrical potential of electret embedded in a MEMS vibrational energy harvester. When a electret device is electrically excited with white noise voltage, the mechanical resonance disappears from the real-time FFT analysis when the superposed dc bias voltage compensates the electret potential, by which the magnitude of the electret potential is known.

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来源期刊

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

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