动力装置电气特性的机械应力依赖性

2006 IEEE International Symposium on Power Semiconductor Devices and IC's Pub Date : 2006-06-04 DOI:10.1541/IEEJIAS.128.577

H. Tanaka, K. Hotta, S. Kuwano, M. Usui, M. Ishiko

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引用次数: 21

摘要

本文描述了机械应力如何影响功率器件的电气特性，这取决于器件的表面结构或器件类型。实验结果表明，电流流向垂直于基片的沟槽结构装置受机械应力的影响最小

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Mechanical stress dependence of power device electrical characteristics

This paper describes how mechanical stress affects the electrical characteristics of a power device, depending on the surface structure of the device or the device type. Experimental results show that devices in which the current flow direction is vertical to the substrate, such as trench structure devices, are affected the least by mechanical stress

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2006 IEEE International Symposium on Power Semiconductor Devices and IC's

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