VLSI可靠性仿真集成TCAD系统

1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095) Pub Date : 1996-09-02 DOI:10.1109/SISPAD.1996.865316

Jin-Kyu Park, Tae-Soo Park, Sang-Hoon Lee, Chang-hoon Choi, Kyung-Ho Kim

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引用次数: 0

摘要

对于不熟悉复杂TCAD工具的VLSI技术开发人员和电路设计人员来说，SANTA是一个有用的环境。通过对静电放电保护的应用，我们发现选择合适的器件宽度和长度可以在不损失性能阈值的情况下减少工艺步骤。

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An integrated TCAD system for VLSI reliability simulation

SANTA is a useful environment to both VLSI technology developer and circuit designers who are not familiar with complex TCAD tools. Through the ESD protection application, we find that a well selected device width and length can reduce process steps without loosing performance threshold.

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来源期刊

1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095)

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