基于剥离能量-剥离速度耦合的多圆盘抛射器从晶圆带上取模的动态模拟

S. Behler
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引用次数: 5

摘要

本文对多盘弹射系统的薄模剥离过程进行了二维仿真。仿真模拟了脱皮过程的动力学过程,可视化了脱皮前扩展与靶模应力的时间关系。它是基于一系列静态快照,像电影一样串联在一起。定义了剥离能量和剥离速度的耦合关系。这允许通过前一个的剥离能量来计算实际快照的几何形状。从而验证了剥离过程的实验数据。它显示了为什么增加圆盘速度导致剥离锋传播减慢,从而导致拾取失败。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dynamic simulation of die pickup from wafer tape by a multi-disc ejector using peel-energy to peel-velocity coupling
A 2D simulation of thin die peeling from wafer tape is presented for a Multi Disc ejection system. The simulation models the dynamics of peeling, and visualizes time-dependency of peel front propagation and target die stress. It is based on a series of static snapshots, stringed together like a movie. A coupling of peel energy and peel velocity is defined. This allows to calculate the geometry of the actual snapshot by the peel energy of the preceding one. As a result, experimental data of a peel process can be verified. It is shown, why an increase in disc velocity leads to a slow-down of peel front propagation, and thus to a pickup failure.
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