170 GHz高灵敏度平面掺杂gaassb基后向二极管

Tsuyoshi Takahashi, Masaru Sato, Y. Nakasha, S. Shiba, N. Hara
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引用次数: 0

摘要

通过在n-InGaAs层中采用平面掺杂的方法,获得了灵敏度高达170 GHz的p-GaAsSb/i-InAlAs/n-InGaAs后向二极管。平面掺杂可以有效地控制二极管的带间隧道效应和结电容。当n-InGaAs层中掺杂浓度降低到1 × 1017 cm-3时,当平面掺杂浓度为2 × 1012 cm-2时,得到反向二极管特性。我们使用相对较大的2 × 2 μm2的平台尺寸在170 GHz下实现了约1,000和2,257 V/ w的非匹配和匹配灵敏度。
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Highly sensitive planar-doped GaAsSb-based backward diodes at 170 GHz
Highly sensitive p-GaAsSb/i-InAlAs/n-InGaAs backward diodes up to 170 GHz were achieved by adopting planar doping in the n-InGaAs layer. The planar doping is effective to control interband tunneling and junction capacitance (Cj) in the diodes. When doping concentration in the n-InGaAs layer was reduced to 1 × 1017 cm-3, backward-diode characteristics were obtained when planar doping was 2 × 1012 cm-2. We achieved an unmatched and matched sensitivity of about 1,000 and 2,257 V/Wusing a relatively large mesa size of 2 × 2 μm2 at 170 GHz.
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