极窄GAA硅纳米线mosfet中漏极电流变异性元件的宽度依赖性，宽度可达2nm

{"title":"极窄GAA硅纳米线mosfet中漏极电流变异性元件的宽度依赖性，宽度可达2nm","authors":"Zihao Liu, T. Mizutani, T. Saraya, M. Kobayashi, T. Hiramoto","doi":"10.7567/ssdm.2021.a-7-04","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":185590,"journal":{"name":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Width Dependence of Drain Current Variability Components in Extremely Narrow GAA Silicon Nanowire MOSFETs down to 2nm Width\",\"authors\":\"Zihao Liu, T. Mizutani, T. Saraya, M. Kobayashi, T. Hiramoto\",\"doi\":\"10.7567/ssdm.2021.a-7-04\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":185590,\"journal\":{\"name\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.7567/ssdm.2021.a-7-04\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extended Abstracts of the 2021 International Conference on Solid State Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.7567/ssdm.2021.a-7-04","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}