绝缘体上硅的光子集成电路

2010 IEEE International SOI Conference (SOI) Pub Date : 2010-11-18 DOI:10.1109/SOI.2010.5641404

W. Bogaerts, S. Selvaraja, P. Dumon, P. Absil, D. van Thourhout, R. Baets

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引用次数: 4

摘要

我们展示了一个在绝缘体上硅的硅光子电路平台。在晶体硅中，波导具有非常低的传播损耗，同时具有非常好的均匀性，这对于高质量的波长滤波器是必不可少的。此外，我们可以使用沉积的非晶材料在任何衬底(包括CMOS)上制造类似的器件，而性能上只有很小的损失。

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Photonic integrated circuits in silicon-on-insulator

We show a platform for silicon photonic circuits in silicon-on-insulator. In crystalline silicon waveguides have very low propagation losses and at the same time extremely good uniformity, which is essential for high-quality wavelength filters. Also, we can use deposited amorphous material to fabricate similar devices on top of any substrate (including CMOS) with only a small penalty in performance.

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2010 IEEE International SOI Conference (SOI)

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