为MOEMS镜像驱动电极设计高电压、高密度互连的可靠性

IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI:10.1109/OMEMS.2002.1031423

A. Jazairy, J.H. Smith, S. Nasiri, J. Bryzek, A. Flannery, M. Novack, R. Sprague, D. Skurnik

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引用次数: 0

摘要

1200镜阵列中直接驱动电极的高密度互连设计报告。我们分析了这种被动方法的可靠性问题，并展示了一种主动集成解决方案的前景。

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Design for reliability of high voltage, high density interconnects for MOEMS mirror drive electrodes

Reports on the design of high density interconnects for direct-drive electrodes in a 1200 mirror array. We analyze reliability issues for this passive approach and demonstrate the promise of an active, integrated solution.

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IEEE/LEOS International Conference on Optical MEMs

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