1微米耗尽型集成电路mesfet的可靠性研究

D. Ogbonnah, A. Fraser
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引用次数: 12

摘要

采用商用的1微米耗尽模式IC工艺制备的GaAs mesfet的栅极降解活化能为1.6 eV。深能级瞬态光谱(DLTS)和电容电压(C-V)测量数据与栅极金属互扩散到砷化镓中导致通道厚度减小的失效机制一致。在290°C通道温度(TCH)下的中位寿命为80小时,对数正态σ为0.7。使用这些值,在TCH= 150°C下,预计FET的故障率在寿命的前100万小时内小于0.01%/ 1000小时(100 FIT)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability Investigation of 1 Micron Depletion Mode IC MESFETs
A 1.6 eV activation energy has been observed for gate degradation of GaAs MESFETs fabricated with a commercially available 1 micron depletion mode IC process. Data from deep level transient spectroscopy (DLTS) and capacitance-voltage (C-V) measurements are consistent with a failure mechanism of gate metal interdiffusion into GaAs resulting in a decrease of channel thickness. The median life at 290 °C channel temperature (TCH) was 80 hours, with a lognormal sigma of 0.7. Using these values, the projected FET failure rate is less than 0.01%/l000 hours (100 FIT) during the first million hours of life at TCH= 150 °C.
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