钛对Bi42Sn2Ag2Ti(Ce,Ga)合金填充石英玻璃低温活性键合的影响

Dong Chen, LanXian Cheng, X. Yue, Guoyuan Li
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引用次数: 0

摘要

石英玻璃作为微电子封装基板或窗口的潜在候选材料具有重要的技术意义。本文研究了活性元素钛(Ti)在大气条件下170℃下Bi42Sn2Ag2Ti(Ce,Ga)合金钎料焊接石英玻璃衬底中的重要作用。焊接过程的时间分别设置为1、15、30、60分钟。研究了钎焊时间对活性元素Ti的微观组织和动态演变的影响。用扫描电镜观察了玻璃/焊料界面,并用能量色散x射线光谱分析了各元素的分布。结果表明,钛在石英玻璃与活性焊料界面处的吸附和偏析可以实现结合。从理论上分析了钛元素在石英玻璃/焊料界面的吸附和偏析,并对界面反应进行了研究。对Ti元素扩散动力学的认识可以进一步解释活性焊接的机理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of Titanium on Low Temperature Active Bonding of Quartz Glass with Bi42Sn2Ag2Ti(Ce,Ga) Alloy Filler
Quartz glass is of great technical importance and getting more attractive as a possible candidate for microelectronic packaging substrate or window. In this work, the significant role of active element titanium (Ti) for soldering quartz glass substrates by Bi42Sn2Ag2Ti(Ce,Ga) alloy filler at 170 °C in atmospheric conditions was studied. The time of soldering process was set to be 1, 15, 30, and 60 min, respectively. The microstructures and the dynamic evolution of active element Ti influenced by soldering time were investigated. The glass/solder interface was observed by scanning electron microscopy and the distribution of each element was analyzed by energy dispersive X-ray spectrometry. Results show that the bonding could be achieved by adsorption and segregation of Ti at the interface between quartz glass and active solder. The adsorption and segregation of the Ti element at the quartz glass/solder interface was analyzed theoretically, and the interfacial reaction has been investigated. The understanding of diffusion kinetics of Ti element can further explain the mechanism of active soldering.
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