超细互连中凝固的原子尺度研究

Zhiyong Wu, Zhiheng Huang, P. Conway, Qingfeng Zeng
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引用次数: 0

摘要

电子封装技术已发展到三维时代,以满足日益增长的产品轻量化、便携化的需求。近年来,人们对纳米材料和纳米结构进行了广泛的研究,以实现微尺度甚至亚微米尺度的互连。然而,建立原子尺度结构与纳米材料性能之间的联系仍然是一个挑战。此外,采用纳米材料所涉及的物理机制尚未完全了解。本文采用相场晶体法在原子尺度上研究了超细互连中的凝固过程。讨论了不同几何形状材料的凝固速率、晶界的形成和相互连接处的原子排列。仿真结果表明,桶形节理和矩形节理的核生长速度快于沙漏形节理。此外,在不同的几何形状下,互连中的晶界形成也不同。结果发现,与较薄的沙漏形互连相比,沙漏形互连中的一个晶界发生了位移。此外,还绘制了模拟原子微观结构中相对于完美晶格的原子间位移,以显示几何形状对原子排列的影响。结果表明,位移的大小取决于互连的几何形状,而位移的流线图的模式受核的位置的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An atomistic scale study on solidification in ultrafine interconnects
The electronic packaging technologies have been developed into the three-dimensional era to fulfill the increasing demands for lightweight, portable products. Recently, nano mamterials and structures have been investigated extensively to enable interconnection in microscale or even submicron scale. However, it is still challenging to establish the link between the atomistic scale structures to the properties of the nano materials. In addition, the physical mechanisms involved in the adoption of the nano materials have not yet been fully understood. This work presents an atomistic scale study on the solidification process in ultrafine interconnects using a phase field crystal method. The solidification rate, the grain boundary formation and the atomistic arrangement in the interconnects of different geometries are discussed. Simulation results show that the nuclei in the barrel-shaped and the rectangular joints grow faster than those in the hourglass-shaped joints. In addition, the grain boundary formation in the interconnects differs in different geometries. It is found that one of the grain boundaries in the hourglass-shaped interconnect is shifted compared to that in the thinner hourglass-shaped interconnects. Furthermore, the displacements between atoms in the simulated atomistic microstructure relative to the perfect lattice are plotted to show the geometry effect on the atomistic arrangement. Results show that the magnitude of the displacements depends on the geometry of the interconnects, and that the pattern of the stream-line plot of displacements is influenced by the position of the nucleus.
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