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具有高表面电位和高热阻的纳米多孔SIO2驻极体

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2014-03-13 DOI:10.1109/MEMSYS.2014.6765665

Masato Suzuki, T. Wada, Tomokazu Takahashi, T. Nishida, Y. Yoshikawa, S. Aoyagi

{"title":"具有高表面电位和高热阻的纳米多孔SIO2驻极体","authors":"Masato Suzuki, T. Wada, Tomokazu Takahashi, T. Nishida, Y. Yoshikawa, S. Aoyagi","doi":"10.1109/MEMSYS.2014.6765665","DOIUrl":null,"url":null,"abstract":"This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous SiO<sub>2</sub>. Electrical charge density in the nano-porous SiO<sub>2</sub> is higher than that in a normal (i.e., nonporous) SiO<sub>2</sub> because there are many voids in the nano-porous SiO<sub>2</sub> and the interface between void and SiO<sub>2</sub> traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO<sub>2</sub> is lower than that of normal SiO<sub>2</sub>. Since SiO<sub>2</sub> is thermally stable, thermal stability of the electrical charge in nano-porous SiO<sub>2</sub> electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO<sub>2</sub> electret is also larger than that using the normal SiO<sub>2</sub> or polymer electret.","PeriodicalId":312056,"journal":{"name":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Nano-porous SIO2 electret with high surface potential and high thermal resistance\",\"authors\":\"Masato Suzuki, T. Wada, Tomokazu Takahashi, T. Nishida, Y. Yoshikawa, S. Aoyagi\",\"doi\":\"10.1109/MEMSYS.2014.6765665\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous SiO<sub>2</sub>. Electrical charge density in the nano-porous SiO<sub>2</sub> is higher than that in a normal (i.e., nonporous) SiO<sub>2</sub> because there are many voids in the nano-porous SiO<sub>2</sub> and the interface between void and SiO<sub>2</sub> traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO<sub>2</sub> is lower than that of normal SiO<sub>2</sub>. Since SiO<sub>2</sub> is thermally stable, thermal stability of the electrical charge in nano-porous SiO<sub>2</sub> electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO<sub>2</sub> electret is also larger than that using the normal SiO<sub>2</sub> or polymer electret.\",\"PeriodicalId\":312056,\"journal\":{\"name\":\"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-03-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2014.6765665\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2014.6765665","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

本文提出了一种具有高表面电位和高热阻的新型驻极体，该驻极体由纳米多孔SiO2制成。纳米多孔SiO2中的电荷密度比普通(即无孔)SiO2中的电荷密度高，这是因为纳米多孔SiO2中存在许多空隙，空隙与SiO2之间的界面强烈地捕获了电荷。因此，纳米多孔SiO2中捕获电荷密度的下降速率低于普通SiO2。由于SiO2具有热稳定性，纳米多孔SiO2驻极体中电荷的热稳定性优于聚合物驻极体。使用纳米多孔SiO2驻极体收集振动能量产生的输出功率也大于使用普通SiO2或聚合物驻极体。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nano-porous SIO2 electret with high surface potential and high thermal resistance

This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous SiO₂. Electrical charge density in the nano-porous SiO₂ is higher than that in a normal (i.e., nonporous) SiO₂ because there are many voids in the nano-porous SiO₂ and the interface between void and SiO₂ traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO₂ is lower than that of normal SiO₂. Since SiO₂ is thermally stable, thermal stability of the electrical charge in nano-porous SiO₂ electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO₂ electret is also larger than that using the normal SiO₂ or polymer electret.

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来源期刊

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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