自动Maszara测试夹具

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947458

V. Masteika, T. Rogers, R. Santilli, S. Fraser, M. Y. A. Aioubi

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引用次数: 0

摘要

我们生产了一种新的、自动化的Maszara测试工具。该工具可用于测量键合晶圆对整个界面的键合强度，并生成键合强度图。该工具还可用于红外检测。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Automatic Maszara testing jig

We have produced a new, automated Maszara testing tool. This tool can be used to measure the bond strength across the entire interface of a bonded wafer pair and produce a bond strength map. The tool can also be used for IR inspection.

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来源期刊

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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