WLCSP应用中电镀SnAg微凸点的焊点可靠性性能

L. England
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引用次数: 2

摘要

随着微电子封装向更小更薄的形式因素迁移,WLCSP封装在行业中变得越来越普遍。在某些应用中,整体WLCSP封装高度限制在300um以内。在这些情况下,可以使用电镀焊料微凸点将焊料凸点高度降低到100um以下的范围。这反过来又允许使用可管理的硅片厚度进行加工。电镀微凸点结构的缺点是表面安装后封装距离减少,从而降低焊点的可靠性。当电镀无铅焊料时,所述组合物通常限于二元合金组合物。这降低了供应商通过选择焊料合金来控制机械性能的灵活性。此外,在高温下使用这些凸点结构可能是有害的,因为与较大的凸点尺寸相比,任何可能发生的金属间化合物生长将代表整个焊点的更大体积百分比。本文主要研究了镀Sn-2.5Ag凸点的WLCSP器件的焊点可靠性。凸起尺寸为80um高度× 120um直径的Cu/Ni UBM堆叠。按照JEDEC测试规范对4×4球阵菊花链装置进行跌落测试和热循环测试,并建立威布尔寿命估计图。此外,还对Sn-Ni金属间化合物(IMC)的生长进行了表征。板装样品在125°C和150°C老化超过1000小时。大约每隔168小时进行一次横截面,以测量所得的内压层厚度。采用幂函数拟合了IMC随时间的增长,并计算了扩散速率常数和活化能。结果表明,在125℃的热时效条件下,合金的IMC增长很小,而将时效温度提高到150℃时,合金的IMC增长严重。在小凸起区域IMC快速增长对焊点施加的高应力导致UBM层在500h时效后不久破裂,在大约1000h后导致灾难性失效。结果表明,通过对焊点的机械应力作用,Sn-2.5Ag微凹凸结构具有较强的坚固性。根据最终的应用温度,它们是一个足够的互连结构,以获得超低的封装厚度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Solder joint reliability performance of electroplated SnAg mini-bumps for WLCSP applications
As microelectronic packages migrate to smaller and thinner form factors, WLCSP packaging is becoming more prevalent in the industry. In certain applications, overall WLCSP package heights are restricted to a maximum of 300um. In these situations, electroplated solder mini-bumps can be used to reduce the solder bump height to the sub-100um range. This in turn allows the use of manageable Si wafer thickness for processing. The downside of the electroplated mini-bump structures is the reduced package standoff after surface mounting, which can reduce solder joint reliability. When electroplating Pb-free solder, the composition is typically limited to a binary alloy composition. This reduces the flexibility a vendor has over the control of mechanical properties through solder alloy selection. In addition, the use of these bump structures at high temperatures can be detrimental since any intermetallic compound growth that may occur will represent a much larger volume percentage of the overall solder joint when compared to a larger bump size. This study focuses on the solder joint reliability of WLCSP devices with electroplated Sn-2.5Ag bumps. The bump size is 80um height × 120um diameter on a Cu/Ni UBM stack. Drop testing and thermal cycle testing was performed on 4×4 ball array daisy chain devices following JEDEC testing specifications, and Weibull lifetime estimation plots were created. In addition, Sn-Ni intermetallic compound (IMC) growth was characterized. Board mounted samples were aged at 125°C and 150°C for over 1000hrs. Cross sections were performed in roughly 168hr intervals in order to measure the resulting IMC layer thickness. IMC growth over time was fitted using a power relationship, and the diffusion rate constant and activation energy was calculated. It was found that thermal aging at 125°C resulted in very little IMC growth, while increasing the aging temperature to 150°C resulted in severe IMC growth. The high stress applied to the solder joint from the rapid IMC growth in the small bump area caused cracking of the UBM layer shortly after 500hrs of aging, which resulted in catastrophic failure after roughly 1000hrs. The results show that the Sn-2.5Ag mini-bump structure is quite robust through mechanical stressing of the solder joints. Depending on the final application temperature, they are an adequate interconnect structure to obtain ultra-low package thicknesses.
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