封装铜线键合装置的失效机制

S. Manoharan, Gopal KrishnanRamaswami, F. McCluskey, M. Pecht
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引用次数: 14

摘要

在过去的几年里,黄金的成本急剧上升,迫使IC制造商转向铜线键合。铜被用于许多塑料封装设备,但制造商仍然对铜线键合设备使用与金线键合设备相同的鉴定测试,尽管这两种互连方式的损伤累积不同,失效机制和模型也明显不同。为了研究导线的损伤,进行了粘结剪切和拉拔试验。然而,由于没有解封装程序来揭示球键和楔键,这些测试通常是在非模压化合物上进行的,这并不能说明模压化合物在故障中的影响。为了研究腐蚀、导线轴向疲劳和导线键疲劳等关键失效机制,研究人员开发了一种新型的导线键解封装方法,该方法采用顺序过程,导致导线键的退化最小,或者在某些情况下不会退化。先前的研究提出了分别揭示球键或楔键的解囊方法,但这些方法不能用于进行拉丝试验。暴露两个球键和楔形键是不容易的,因为电线往往在环断裂,由于长曝光时间。本文描述了一种成功的解封装技术,并给出了带有铜线键的设备的键剪结果,从而允许对封装设备进行研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Failure mechanisms in encapsulated copper wire-bonded devices
The cost of gold has increased drastically in the last few years forcing IC manufacturers to switch to copper wire bonding. Copper is used in many plastic-encapsulated devices, but manufacturers are still using the same qualification tests for copper wire-bonded devices as for gold wire-bonded devices, even though damage accumulates differently in these two interconnections, and the failure mechanisms and models are significantly different. To study the damage to the wire, bond shear and pull tests are performed. However, due to the absence of a decapsulation procedure to reveal the ball bond and the wedge bond, these tests are usually performed on non-molded compounds, which does not account for the effect of the molding compound in the failure. To study critical failure mechanisms such as corrosion, wire axial fatigue, and wire bond fatigue, a novel method for wire bond decapsulation was developed, that uses a sequential process, resulting in minimum degradationor, in some cases, no degradation of wire bonds. Previous studies presented decapsulation methods that either revealed the ball bond or the wedge bond separately, but these methods cannot be used to perform wire pull tests. Exposing both the ball bond and the wedge bond is not easy, as the wire tends to break at the loop due to the long exposure time. This paper, describes - a successful decapsulation technique and presents bond shear results for devices with copper wire bonds, thereby permitting studies of encapsulated devices.
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