多晶硅双极晶体管串联电阻提取方案的准确性

Proceedings of IEEE Bipolar/BiCMOS Circuits and Technology Meeting Pub Date : 1994-10-10 DOI:10.1109/BIPOL.1994.587883

E. Dubois, P. Bricout, E. Robilliart

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引用次数: 3

摘要

在这项工作中，用于确定发射极和基极串联电阻的两种实验方法进行了严格的审查，并与基于器件模拟的精确解决方案进行了比较。此外，还研究了串联电阻对发射极多晶硅/单晶界面上存在的势垒的敏感性。

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Accuracy of series resistances extraction schemes for polysilicon bipolar transistors

In this work, two experimental methods used for the determination of the emitter and base series resistances are critically reviewed and compared to an accurate solution based on device simulations. In addition, the sensitivity of the series resistances on the potential barriers present at the emitter polysilicon/monocrystal interface is investigated.

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Proceedings of IEEE Bipolar/BiCMOS Circuits and Technology Meeting

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