多层压电驱动器的槽切割与电镀平面制作

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838488

G. Suzuki, M. Esashi

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引用次数: 8

摘要

本文报道了一种多层压电作动器的平面制作新方法。该方法采用切割、电镀和激光辅助蚀刻(LAE)三种技术来构建多层结构。采用该方法制作了23 ~ 120层有源层的原型执行器。在100 V下，实测位移分别为2.5 /spl mu/m(23层)和7.3 /spl mu/m(120层)。这些数值与材料的压电特性计算值一致。

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Planar fabrication of multilayer piezoelectric actuator by groove cutting and electroplating

This paper reports a new planar fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), were used for constructing the multilayer structure. Prototype actuators with 23-120 active layers were fabricated in this method. The measured displacement was 2.5 /spl mu/m (23 layers) and 7.3 /spl mu/m (120 layers) at 100 V, respectively. These values agree with the calculated values from the piezoelectric properties of the material.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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