通过使用自动化晶圆测试数据收集来减少周期时间

N. Tandon, A. Sanchez, S. Arora, F. Yousuf, J. Miller, R. Elder
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引用次数: 1

摘要

半导体工业通常采用许多策略来缩短周期时间。这篇技术论文描述了一个集成的自动化环境,该环境已经在德州仪器(TI)的Kilby中心(KFAB)的各种测试平台上实现。除了减少晶圆测试周期时间外,测试自动化消除了人为错误,这是供应商“工作工具”的额外好处。所引用的自动化环境与制造执行系统(MES)无缝集成,便于以文件格式和电气测试数据库收集数据。自动化流程通常包括测试初始化、系统流程验证、测试硬件迷你诊断、探针卡验证、测试程序加载和执行、数据上传到MES和测试数据库、验证收集的测试数据、执行批次配置以及在MES中移动/保持批次。然而,不同设备供应商提供的多个测试平台之间存在差异。除了详细介绍测试平台的自动化组件外,本文还重点介绍了周期时间的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reduce your cycle time by utilizing automation for wafer test data collection
Many strategies are generally applied in the semiconductor industry to reduce cycle times. This technical paper describes an integrated automation environment that has been implemented on the various tester platforms at Kilby Center (KFAB) of Texas Instruments (TI). In addition to reducing wafer test cycle time, the tester automation eliminates human errors, which is an added benefit over vendor "job tools". The referenced automation environment integrates seamlessly with the manufacturing execution system (MES), and facilitates data collection in both file format and in an electrical test database. The automation flow typically includes the tasks of tester initialization, system processes' validation, tester hardware mini-diagnostics, probe card verification, test program load and execution, data upload to MES and test database, validation of collected test data, execution of lot disposition, and lot movement/hold in MES. However, there are differences across multiple tester platforms provided by different equipment vendors. In addition to detailing the automation components of tester platforms, the paper highlights the cycle time impacts.
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