用Au薄膜在空气中与蓝宝石或金属衬底进行室温键合

2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2014-07-15 DOI:10.1109/LTB-3D.2014.6886166

M. Ishii, H. Kon, M. Uomoto, T. Nakaya, T. Shimatsu

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引用次数: 5

摘要

利用Au薄膜在空气中实现了蓝宝石-蓝宝石和蓝宝石-金属衬底的室温键合。这种键合技术可以支持蓝宝石在不同行业的潜在应用。

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Room temperature bonding of sapphire with sapphire or metal substrates in Air using Au films

Room temperature bonding of sapphire-sapphire and sapphire-metal substrates was achieved in Air using Au films. This bonding technique can support expansion of the potential applications of sapphire in diverse industries.

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2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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