W. Fan, C. K. Wong, Y. M. Tan, K. M. Chua, Bill Freeman, H. J. Jiang
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Design and fabrication of micro thermoelectric cooler on LTCC substrate
The paper presents the design and fabrication of micro thermoelectric cooler (TEC) using LTCC process and SMT technique. Two micro thermoelectric module prototypes illustrate the construction and performance of the micro TECs. The micro TEC performance simulation results of the micro thermoelectric module indicate that the maximal parameters and performance curves can be optimized based on maximum current (Imax), maximum voltage (Vmax), maximum cooling power (Qmax) and maximum temperature difference (DeltaTmax)