{"title":"优化了直流磁控溅射法制备氧化铟薄膜","authors":"A. Axelevitch, E. Rabinovitch, G. Golan","doi":"10.1109/MAM.1997.621102","DOIUrl":null,"url":null,"abstract":"Transparent conductive coatings with high electrical conductivity and maximum optical transparency attracts much attention in recent years. Most of the works published till present in this field were concentrated in the physical analysis and design of thin film coatings. In our work we present a different approach to the fabrication design of transparent conductive thin films. Instead of analyzing complex physical models of the final product, a linear mathematical model to control the processing stages of these films is applied. The linear model is based on a mathematical approach which optimizes the processing parameters to yield best coating performance.","PeriodicalId":302609,"journal":{"name":"European Workshop Materials for Advanced Metallization,","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimized indium oxide films prepared by DC magnetron sputtering\",\"authors\":\"A. Axelevitch, E. Rabinovitch, G. Golan\",\"doi\":\"10.1109/MAM.1997.621102\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Transparent conductive coatings with high electrical conductivity and maximum optical transparency attracts much attention in recent years. Most of the works published till present in this field were concentrated in the physical analysis and design of thin film coatings. In our work we present a different approach to the fabrication design of transparent conductive thin films. Instead of analyzing complex physical models of the final product, a linear mathematical model to control the processing stages of these films is applied. The linear model is based on a mathematical approach which optimizes the processing parameters to yield best coating performance.\",\"PeriodicalId\":302609,\"journal\":{\"name\":\"European Workshop Materials for Advanced Metallization,\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-03-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"European Workshop Materials for Advanced Metallization,\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MAM.1997.621102\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"European Workshop Materials for Advanced Metallization,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MAM.1997.621102","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimized indium oxide films prepared by DC magnetron sputtering
Transparent conductive coatings with high electrical conductivity and maximum optical transparency attracts much attention in recent years. Most of the works published till present in this field were concentrated in the physical analysis and design of thin film coatings. In our work we present a different approach to the fabrication design of transparent conductive thin films. Instead of analyzing complex physical models of the final product, a linear mathematical model to control the processing stages of these films is applied. The linear model is based on a mathematical approach which optimizes the processing parameters to yield best coating performance.