微电子封装中的分层预测

W. V. van Driel, M. van Gils, G.Q. Zhang
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引用次数: 15

摘要

目前,微电子工业中存在许多与脱层有关的可靠性问题。例如:模提;与双层脱层有关的下键缝线断裂;钝化裂纹与切屑与模塑料之间的界面分层有关。这些可靠性问题是由不同材料特性之间的不匹配驱动的,例如CTE、湿胀、蒸汽压引起的膨胀以及由于吸湿而导致的界面强度下降。相关的负面业务后果是显著的。显然,在找到可能的解决方案之前,应该先探索这些分层相关问题的驱动机制,例如昂贵的设计更改和/或昂贵的材料类型来限制分层。本文重点介绍了我们的研究结果,利用最先进的虚拟样机和/或鉴定技术,找到微电子封装中分层相关可靠性问题的驱动机制。数值预测与新型界面粘附测试技术相结合,能够测量界面强度作为温度和湿度的函数。以外露衬垫封装族中的分层为典型载体。开发了新的数值技术来预测微电子封装中界面分层的发生与制造和测试条件的关系。这些技术是对虚拟裂纹闭合、j积分、内聚区和面积释放等已知方法的改进。区域释放法不需要任何初始裂缝的预设位置。相反,在试样内的任何期望位置,计算面积能量释放值,该值基本上是由释放试样中每个点周围的面积(具有定义的尺寸)产生的。建立了几种可靠的非线性有限元模型来预测水分扩散、变形、应力和界面能历史作为过程、温度和水分的函数。从而预测了湿胀、蒸汽压、界面退化和热膨胀对分层失效的影响。最后,通过将模型与基于仿真的优化方法相结合,得出了减少微电子封装可靠性问题的设计准则,结果为我们提供了有关分层相关问题机制的一般见解
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Prediction of Delamination in Micro-electronic Packages
At present, a lot of delamination related reliability problems are observed in the micro-electronic industry. Examples are: die-lift; downbond stitch breaks associated with diepad delamination; passivation cracks related to interface delamination between chip and moulding compound. These reliability problems are driven by the mismatch between the different material properties, such as CTE, hygro-swelling, vapor pressure induced expansion, and degradation of the interfacial strength due to moisture absorption. The associated negative business consequence is significant. Clearly, the driving mechanisms of these delamination related problems should be explored before possible solutions can be found, such as expensive design changes and/or expensive material types to limit the delamination. This paper highlights our results to find the driving mechanisms for delamination-related reliability problems in micro-electronic packages using state-of-the-art virtual prototyping and/or qualification techniques. The numerical predictions are combined with novel interfacial adhesion test techniques able to measure the interfacial strength as functions of both temperature and moisture. As a typical example, delamination in the exposed pad package family is taken as a carrier. Novel numerical techniques are developed to predict the occurrence of interfacial delamination as function of manufacturing and testing conditions in micro-electronic packages. These techniques are improvements of well-known methods, such as virtual crack closure, J-integral, cohesive zone, and area release. The area release method does not require any presupposed position of any initial crack. Instead, at any desired positions within the specimen, an area energy release value is calculated which basically results from releasing an area (having a defined dimension) around each point in the specimen. Several reliable non-linear finite element models are developed to predict the moisture diffusion, deformation, stress, and interfacial energy history as functions of processes, temperature and moisture. Thus the effect of hygro-swelling, vapor pressure, interfacial degradation, and thermal expansion on delamination failures is predicted. Finally, by combining the models with simulation based optimization methods, design guidelines are derived for reducing reliability problems in microelectronic packages where the results provide us generic insight in the mechanisms of delamination-related problems
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