基于cnn的IDDQ离群值识别随机回归

Chun-Teng Chen, Chia-Heng Yen, Cheng Wen, Cheng-Hao Yang, Kai-Chiang Wu, Mason Chern, Ying-Yen Chen, Chun-Yi Kuo, Jih-Nung Lee, Shu-Yi Kao, M. Chao
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引用次数: 6

摘要

为了降低DPPM(百万分率缺陷),IDDQ测试方法可用于识别“异常值”,这些异常值是潜在缺陷,但未被签名功能和参数测试检测到。传统的IDDQ测试范例依赖于简单的统计6σ规则或工程师的经验,通常过于保守,无法有效地识别非平凡的异常值,特别是当空间相关性非常关注/影响时。本文采用随机回归模型,对待测模具IDDQ的均值和方差进行了预测。根据预测的平均值和方差,我们推导出预期的IDDQ范围,如果DUT的实际IDDQ测量超出预期范围,则将其识别为异常值。本文提出的随机回归模型是通过训练卷积神经网络(CNN)得到的,基于卷积核映射与大量工业数据的原始性质,可以考虑/捕获空间相关性(由于空间相关的过程变化等)。训练后的数据驱动CNN在r平方(0.958)和RMSE(0.783)方面具有很高的准确率,识别出的异常值百分比(0.047%)非常接近理论参考值(0.050%),验证了我们提出的方法的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
CNN-based Stochastic Regression for IDDQ Outlier Identification
In order to reduce DPPM (defect parts per million), IDDQ testing methodology can be exploited for identifying "outliers" which are potentially defective but not detected by signoff functional and parametric tests. Conventional IDDQ testing paradigms depending on a simple statistical 6σ rule or engineers’ experience are usually too conservative to effectively identify non-trivial outliers, especially when spatial correlations are of great concern/influence. In this paper, by employing a stochastic regression model, the mean as well as the variance of the IDDQ of a die under test (DUT) can be predicted. According to the predicted mean and variance, we derive an expected IDDQ range and identify the DUT as an outlier if its actual IDDQ measurement is beyond the expected range. The proposed stochastic regression model is obtained by training a convolutional neural network (CNN) and, based on its primitive property of convolutional kernel mapping with large volume of industrial data, spatial correlations (due to spatially-correlated process variations, etc) can be considered/captured. The trained data-driven CNN is highly accurate in terms of R-square (0.958) and RMSE (0.783), and the percentage of identified outliers (0.047%) is very close to the theoretical reference (0.050%), which validates the efficacy of our proposed methodology.
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