{"title":"集成电路加工的热丝真空微器件","authors":"K. R. Williams, R. Muller","doi":"10.1109/IEDM.1992.307384","DOIUrl":null,"url":null,"abstract":"Micromachined vacuum devices that employ a hot tungsten filament as a source of electromagnetic radiation and thermionically emitted electrons have been fabricated. These hot-filament devices have been characterized for use as \"microlamps,\" vacuum diodes, and triodes. Coplanar filaments are used for the cathodes and anodes in the diodes, and also for the grids in the triodes. The filaments are typically 200- mu m long and are suspended over a cavity in the silicon substrate. The devices tested were operated in a pumped vacuum chamber.<<ETX>>","PeriodicalId":287098,"journal":{"name":"1992 International Technical Digest on Electron Devices Meeting","volume":"73 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"IC-processed hot-filament vacuum microdevices\",\"authors\":\"K. R. Williams, R. Muller\",\"doi\":\"10.1109/IEDM.1992.307384\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Micromachined vacuum devices that employ a hot tungsten filament as a source of electromagnetic radiation and thermionically emitted electrons have been fabricated. These hot-filament devices have been characterized for use as \\\"microlamps,\\\" vacuum diodes, and triodes. Coplanar filaments are used for the cathodes and anodes in the diodes, and also for the grids in the triodes. The filaments are typically 200- mu m long and are suspended over a cavity in the silicon substrate. The devices tested were operated in a pumped vacuum chamber.<<ETX>>\",\"PeriodicalId\":287098,\"journal\":{\"name\":\"1992 International Technical Digest on Electron Devices Meeting\",\"volume\":\"73 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1992 International Technical Digest on Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1992.307384\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 International Technical Digest on Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1992.307384","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Micromachined vacuum devices that employ a hot tungsten filament as a source of electromagnetic radiation and thermionically emitted electrons have been fabricated. These hot-filament devices have been characterized for use as "microlamps," vacuum diodes, and triodes. Coplanar filaments are used for the cathodes and anodes in the diodes, and also for the grids in the triodes. The filaments are typically 200- mu m long and are suspended over a cavity in the silicon substrate. The devices tested were operated in a pumped vacuum chamber.<>
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