微电子用硅基密封材料的降解

M. Y. Mehr, P. Hajipour, H. Zeijl, W.D. van El, Thierry Cooremans, F. D. Buyl, G.Q. Zhang
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引用次数: 0

摘要

粘合剂连接是许多工业应用中的关键连接技术,包括汽车,航空航天工业,生物医学设备和微电子元件。由于连接相似或不同构件的需求越来越大,胶粘接越来越受到重视,主要是在设计轻量化结构的框架内。硅酮密封胶具有热稳定性好、吸能性好、阻尼特性好等特点,在工程应用中得到了广泛的应用。在这些应用中,密封胶通常暴露在各种环境应力下,如高温、机械应力、湿度、光辐射和化学侵蚀。密封胶的长期稳定性和耐久性对相关应用的性能至关重要。硅橡胶在微电子应用中的主要降解因素是温度、湿度、碱和机械载荷。本文的重点是了解硅酮密封胶和胶粘剂的不同失效机制,并研究不同的环境、机械和使用相关应力如何归因于硅酮密封胶和胶粘剂的降解动力学和程度。系统地研究了不同失效机制对微电子器件寿命和可靠性的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Degradation of silicone-based sealing materials used in microelectronics
Adhesive bonding is a key joining technology in many industrial applications, including automotive, aerospace industries, biomedical devices, and microelectronic components. Adhesive bonding is gaining more and more attention due to the increasing demand for joining similar or dissimilar components, mostly within the framework of designing lightweight structures. Silicone sealant is widely used in engineering application due to its thermal stability, excellent energy absorption, and good damping characteristics. In those applications, sealant usually exposed to various environment stress, such as, high temperature, mechanical stress, humidity, light radiation, and chemical attack. Long-term stability and durability of sealant is crucial to the performance of the associated application. The main degrading factors for silicone in microelectronic applications are temperature, humidity, alkali, and mechanical loading. The focus in the present paper is to understand different failure mechanisms in silicone sealants and adhesives and to study how different environmental, mechanical, and service-related stresses attribute to the kinetics and extent of degradation in silicone sealants and adhesives. The impact of different failure mechanisms on the lifetime and reliability of microelectronic devices will be methodically investigated.
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