密封集成电路封装表面导电性水分监测仪的特性

17th International Reliability Physics Symposium Pub Date : 1979-04-01 DOI:10.1109/IRPS.1979.362877

R. Lowry, L. A. Miller, A. Jonas, J. Bird

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引用次数: 8

摘要

描述了一种用于测量密封封装环境含水量的原位表面电导率传感器。给出了质谱和体积效应传感器的相关实验结果。讨论了水解吸和浸出离子污染的传感器研究。表面电导率传感器非常适合定义所有类型的密封封装内的湿度水平。

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Characteristics of a Surface Conductivity Moisture Monitor for Hermetic Integrated Circuit Packages

An in-situ surface conductivity sensor for measuring water content of hermetic package ambients is described. Results of correlation experiments with mass spectroscopy and volume-effect sensors are presented. Sensor studies of water desorption and contamination by leached ions are discussed. The surface conductivity sensor is well-suited to defining moisture levels within all types of hermetic packages.

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17th International Reliability Physics Symposium

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