基于拉曼实验的铜衬底上gan - led焊接热机械应力建模

E. Liu, F. Conti, R. Signorini, Enrico Brugnolotto, Sri Krishna Bhogaraju, G. Elger
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引用次数: 4

摘要

在半导体器件制造中,具有不同物理化学特性的各种材料相互连接,并且需要数百个顺序处理步骤。在这方面,由于压缩和拉伸应变引起的热机械应力是设备内部的一个严重方面。由于材料之间的热膨胀系数差异较大而产生的残余热机械应力不仅在结合界面上产生可靠性问题,而且对大功率半导体有源区的寿命产生影响。在这项研究中,基于氮化镓(GaN)的蓝色led通过金层结合到硅载体上,与共晶金锡(AuSn)焊接在铜板或铝绝缘金属(AI-IMS)上。对于这两块板,在甲酸蒸气的存在下进行回流焊。用拉曼光谱对其进行了研究。建立了一个有限元模型来模拟组件中的热机械应力。测量值和模拟值在室温、-50°C和180°C下进行比较和评估。研究结果为led微电子器件的组装工艺优化提供了指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling Thermo-Mechanical Stress in GaN-LEDs Soldered on Copper Substrate with Simulations Validated by Raman Experiments
In semiconductor devices manufacturing, various materials with different physico-chemical characteristics are connected and over hundreds of sequenced processing steps are necessary. In this regard, thermomechanical stress due to compressive and tensile strain is a serious aspect inside the device. Residual thermomechanical stress due to large difference in coefficients of thermal expansion between the materials generates reliability problems not only at the bonded interfaces but also for the lifetime of the active regions of the high power semiconductors. In this study, blue LEDs based on gallium nitride (GaN) bonded to a silicon carrier by a gold layer were soldered with eutectic gold-tin (AuSn) on a copper board or an aluminum insulated metal (AI-IMS). For both boards a reflow process in presence of formic acid vapor was used for soldering. The assemblies were studied using Raman spectroscopy. A finite element model was developed to simulate the thermomechanical stress present in the assemblies. Measured and simulated values were compared and evaluated at room temperature, at -50°C and at 180°C. The results suggest guidelines for the optimization of the assembling process of LED-based microelectronic devices.
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