先进的按订单晶圆制造在制品控制

R. Sturm, F. Frauenhoffer, J. Dorner, O. Kirschenhofer, T. Reisinger
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引用次数: 10

摘要

本文概述了晶圆制造过程中在制品管理的先进调度策略。此外,一般在制品控制理念的优缺点是对立的。针对ASIC生产等复杂的定制环境,对几种控制策略进行了评价。根据飞利浦SMST的实际车间环境和目前使用的控制策略,提出了以下两个问题的建议:未来在制品控制系统在晶圆制造中的应用要求是什么?如何使用现有的在制品控制和调度系统在车间实施和引入这些控制政策?
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advanced WIP control for make-to-order wafer fabrication
This paper gives an overview of advanced scheduling and dispatching policies for WIP (work in process) management within the wafer fabrication process. Additionally, the pros and cons of general WIP control philosophies are opposed. Several control policies are evaluated for the application in complex make-to-order environment such as ASIC production. Based on the real shop floor environment of Philips SMST and the currently used control policies a proposal is presented answering the following two questions: what are the requirements of tomorrow's WIP control systems applied in make-to-order wafer fabrication; and how can these control policies be implemented and introduced on the shop floor using existing WIP control and scheduling systems?.
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