混合导电通道的高阈值电压GaN HEMT

Wanjie Li, Luqi Tao, Liming Wang, Xu Zhang, Xian-dong Li, Xianping Chen
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引用次数: 0

摘要

近年来,宽带隙半导体材料碳化硅(SiC)和氮化镓(GaN)因其优异的性能而受到广泛关注。特别是,GaN器件在低压小型化电源和5G通信领域得到了应用。对于用于小型化电源的氮化镓高电子迁移率晶体管(HEMT)器件来说,较低的阈值电压(Vth)是一个亟待解决的问题。本文提出了一种具有新型混合导电通道的HEMT器件。该器件将阈值电压提高到3.21V,而饱和电流能力仍达到0.46A/mm。与传统器件一样,新器件的饱和电流能力受到阻挡层铝成分的影响。但与传统器件不同的是,该器件的阈值电压可以在一定范围内通过改变p型掺杂层的掺杂浓度来调节。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High threshold voltage GaN HEMT with mixed conductive channel
In recent years, wide-band-gap semiconductor materials silicon carbide (SiC) and gallium nitride (GaN) are receiving widespread attention because of their superior performance. In particular, GaN devices have been applied in the fields of low-voltage miniaturized power supplies and 5G communications. For GaN high electron mobility transistor (HEMT) devices used in miniaturized power supplies, the lower threshold voltage (Vth) is a problem that needs to be solved urgently. In this paper, the HEMT device having a novel mixed conducting channel. The device raises the threshold voltage to 3.21V while the saturation current capability still reached 0.46A/mm. As with conventional devices, the saturation current capability of the new device is affected by the Al composition of the barrier layer. But unlike conventional devices, the threshold voltage of the device can be adjusted by changing the doping concentration of the p-type doped layer within a certain range.
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