用于集成传感器应用的多晶硅新技术

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838500

Mingxiang Wang, Z. Meng, Y. Zohar, M. Wong

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引用次数: 5

摘要

一种新型的金属诱导横向结晶(MILC)技术被应用于多晶硅(poly-Si)的形成，大大提高了材料特性。与传统的多晶硅相比，MILC多晶硅不仅可以提高传感器的性能，还可以提高薄膜晶体管的性能。MILC多晶硅可以同时实现多种传感和电子器件，从而使MILC成为集成硅微加工的使能技术。

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A new polycrystalline silicon technology for integrated sensor applications

A novel metal-induced lateral crystallization (MILC) technique has been applied to the formation of polycrystalline silicon (poly-Si) with greatly enhanced material characteristics. Compared to conventional poly-Si, MILC poly-Si gives rise to much improved performance not only in sensors but also in thin film transistors. A variety of sensing and electronic devices can be realized simultaneously on MILC poly-Si, thus making MILC an enabling technology for integrated silicon micro-machining.

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Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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