Fully integrated silicon based optical motherboards

Optical-fiber-based telecommunications networks require the use of complex optical systems involving semiconductor lasers, detectors, fiber amplifiers, waveguides, and control electronics. A silicon motherboard process technology is described which enables the full range of components to be fabricated on the motherboard (waveguides), mounted on the motherboard (lasers and detectors), or connected to the motherboard (optical fibers or further motherboards). For each element of the overall silicon motherboard process, the fabrication approach used and the optical performance are described. Finally, some potential applications of the technology are outlined.<>