InP的VPE、MOVPE、MBE和CBE (MOMBE)及其相关材料的综述与展望

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351) Pub Date : 1998-10-06 DOI:10.1109/SMICND.1998.732334

A. Mircea, F. Alexandre, J. Decobert, L. Goldstein, J. Harmand, A. Ougazzaden

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引用次数: 0

摘要

基于inp的外延市场仍然很小，不同的生产方法并存。新来源可能会重新引起人们对固体源MBE的兴趣。在MOVPE和CBE中，趋势是降低温度和提高安全性。研究了两类新型材料。主要的挑战是用于用户接入网的廉价光电设备和非常高速的微电子。

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Review and prospects for VPE, MOVPE, MBE and CBE (MOMBE) of InP and related materials

The market for InP-based epitaxies is still small and the different production methods coexist. Novel sources may renew the interest in solid source MBE. In MOVPE and CBE the tendency is towards lower temperatures and increased safety. Two novel families of materials are studied. The main challenges are cheap optoelectronic devices for the subscriber access network and very high speed microelectronics.

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来源期刊

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)

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