多输入/多输出，运行到运行控制器，用于精确和稳定的外延过程:APC:先进的过程控制

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2016-05-16 DOI:10.1109/ASMC.2016.7491121

R. Benjamin, Lippl Gerhard, Lipp Stefan

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引用次数: 1

摘要

复杂外延系统的多进/多出运行到运行控制器的开发和使用是本论文的主题。该系统采用动态状态值，可在两种不同的模式下运行。这允许制造高精度的外延薄膜。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Multiple in/Multiple out, run to run controller for accurate and stable epitaxy processes: APC: Advanced process control

The development and usage of a Multiple in / Multiple out Run to Run Controller for complex epitaxy systems is the topic of this manuscript. The system uses dynamic status values and can be operated in two different modes. This allow to manufacture high accuracy epitaxial films.

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来源期刊

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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