2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - 最新文献

In-line characterization of EDRAM for a FINFET technology using VC inspection

Pub Date : 2016-06-16 DOI: 10.1109/ASMC.2016.7491150 O. Patterson, R. Hafer, S. Mittal, Ankur Arya, K. Stein, H. Ho, William Davies, Xiaohu Tang, Brian Yueh-Ling Hsieh, Shuen-Cheng Chris Lei

Yield improvement and queue time relaxation at contact process

Pub Date : 2016-06-16 DOI: 10.1109/ASMC.2016.7491163 Nitin Garg, Philippe Helal, P. Muralidhar, S. Crown, Vincent Sih, S. Waite, Silas Scott

Dispatching rules considering transport-related restrictions during failure scenarios — A use case: FA: Factory automation

Pub Date : 2016-06-16 DOI: 10.1109/ASMC.2016.7491110 Robert Schmaler, C. Hammel, T. Schmidt, Matthias Schöps

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