IMC生长对微焊点热循环可靠性的影响

Haiyan Liu, Cheng Xu, Xiaoyang Liu, Daquan Yu, Fengwei Dai, Yuan Lu, D. Shangguan
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引用次数: 6

摘要

本文对2.5D封装中微凸点的热循环可靠性进行了测试和分析。建立了不同金属间化合物(IMC)厚度微碰撞件的有限元分析模型,模拟了IMC层对微碰撞件疲劳行为的影响。结果表明,考虑IMC厚度时,钎料应力显著增加,随着IMC厚度的增加,钎料应力略有增加。研究了IMC层的热机械应力,以评估IMC集成的可靠性。结果表明,应力随IMC厚度的增加而急剧减小;当焊料全部转化为IMC时,热机械应力降至仅为1μm IMC时的20%。通过截面形貌分析热循环试验后的失效模式。锡焊料与IMC层界面处出现了粘结裂纹,IMC层厚度越厚的凸起处损伤越严重,与有限元分析结果吻合较好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of IMC growth on thermal cycling reliability of micro solder bumps
In this study, thermal cycling reliability tests and analysis for micro solder bump in 2.5D packaging were conducted. Finite element analysis modeling of micro bump with different intermetallic compound (IMC) thickness was developed to model the effect of IMC layer on fatigue behavior of micro bumps. It was found that stress in solder increased notably when the IMC layer is taken into consideration, and increased slightly as further increase in the IMC thickness. The thermal mechanical stress in IMC layer was also studied to assess the reliability of IMC integration. It was found that the stress decreased sharply with the increase of IMC thickness; when all the solder transformed into IMC, the thermal mechanical stress decreased to only 20% of the stress in 1μm IMC. Failure mode after thermal cycling tests was analyzed by cross section morphology. Cohesive cracks in the solder took place at the interface of tin solder and IMC layer, and heavier damage was found in bumps with thicker IMC thickness, which agreed well with the FEA results.
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