静电放电(ESD)和电气超应力(EOS) -组件和系统中失效分析和测试方法的最新状态

S. Voldman
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引用次数: 2

摘要

随着微电子技术向纳米电子技术的发展,静电放电(ESD)和电气超应力(EOS)将继续影响半导体元件和系统。本文重点介绍了静电放电(ESD)和电超应力(EOS)的研究现状,重点介绍了失效机制和测试方法。本教程提供了EOS现象、ESD和EOS故障机制、测试和测试标准以及新的故障分析技术的清晰图片。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrostatic Discharge (ESD) and Electrical Overstress (EOS) — The state of the art for methods of failure analysis, and testing in components and systems
Electrostatic Discharge (ESD) and Electrical Overstress (EOS) continue to impact semiconductor components and systems as technologies scale from micro-to nano-electronics. This paper focuses on the state of the art of electrostatic discharge (ESD) and electrical overstress (EOS), with an emphasis on failure mechanisms and testing. The tutorial provides a clear picture of EOS phenomena, ESD and EOS failure mechanisms, testing and testing standards, and new failure analysis techniques.
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