制程表征及制程缺陷对倒装晶片可靠性的影响

B. Lewis, Hilary Sasso
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引用次数: 1

摘要

加工细间距倒装芯片器件继续给封装和制造工程师带来问题。优化工艺参数以限制缺陷和提高装配的长期可靠性可能是一项非常繁琐的任务。影响工艺稳健性的参数包括焊剂类型和放置参数。最终,这些工艺参数可以通过抑制或诱导工艺缺陷来影响倒装芯片组装的长期可靠性。因此,需要注意开发一种足够强大的工艺,以提供高产量和长期可靠性,但仍然与标准表面贴装技术工艺兼容。这就是流程优化变得最关键和最困难的地方。用于浸渍工艺的通量薄膜的最佳高度是多少?需要多大的力才能保证焊料凸起与焊盘接触?在保持流线型、经过验证的流程的同时,实现高产量和高可靠性的限制界限是什么?下面的研究评估了一组工艺参数及其对工艺缺陷和可靠性的影响。该研究评估了工艺参数,包括助焊剂类型、助焊剂应用参数、贴片力和贴片精度,以确定它们的影响。研究中检查的缺陷包括焊料空洞、焊料润湿不足、下填充层的裂纹扩展和分层。组件将进行液对液热冲击测试(- 55°C至125°C),以确定由上述缺陷引起的失效模式。结果将显示工艺参数的变化对良率和可靠性的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Process Characterization and the Effect of Process Defects on Flip Chip Reliability
Processing fine pitch flip chip devices continues to pose problems for packaging and manufacturing engineers. Optimizing process parameters such that defects are limited and long-term reliability of the assembly is increased can be a very tedious task. Parameters that effect the robustness of the process include the flux type and placement parameters. Ultimately, these process parameters can effect the long-term reliability of the flip chip assembly by either inhibiting or inducing process defects. Therefore, care is taken to develop a process that is robust enough to supply high yields and long term reliability, but still remains compatible with a standard surface mount technology process. This is where process optimization becomes most critical and difficult. What is the optimum height of the flux thin film used for a dip process? What force is required to insure that the solder bumps make contact with the pads? What are the limiting boundaries in which high yields and high reliabilities are achieved, while maintaining a streamlined, proven process? The following study evaluates a set of process parameters and their impact on process defects and reliability. The study evaluates process parameters including, flux type, flux application parameters, placement force and placement accuracy to determine their impact. Solder voiding, inadequate solder wetting, and crack propagation and delamination in the underfill layer are defects examined in the study. Assemblies will be subjected to liquid-to-liquid thermal shock testing (−55° C to 125°C) to determine failure modes due to the aforementioned defects. The results will show how changes in process parameters effect yield and reliability.
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