电子封装用LCP/Cu层压技术

T. Suga, A. Takahashi, M. Howlader, K. Saijo, S. Oosawa
{"title":"电子封装用LCP/Cu层压技术","authors":"T. Suga, A. Takahashi, M. Howlader, K. Saijo, S. Oosawa","doi":"10.1109/POLYTR.2002.1020205","DOIUrl":null,"url":null,"abstract":"Liquid crystalline polymer (LCP) is expected to be used for the lamination of electronic circuit boards because of its excellent mechanical and electric properties, such as a low dielectric constant and dimensional stability. However, it has not been widely used yet due to the weak interaction between LCP and Cu. Roughened surfaces of Cu foil that could deteriorate the electrical property are being used in conventional lamination process in order to improve the bonding strength. Surface activated bonding (SAB) of Cu/LCP based on a surface cleaning process by physical bombardment in vacuum has been performed to achieve the strong bonding. A peel strength of 800/spl sim/900 g/cm of the laminate prepared by SAB process is achieved, and the surface roughness of the interface between LCP and Cu is controlled to be less than 100 nm. In this experiment, additional treatment including Cu deposition on LCP and annealing after bonding is applied in order to obtain strong bonding. The effects of these treatments are investigated with the discussion of bonding mechanism.","PeriodicalId":166602,"journal":{"name":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":"{\"title\":\"A lamination technique of LCP/Cu for electronic packaging\",\"authors\":\"T. Suga, A. Takahashi, M. Howlader, K. Saijo, S. Oosawa\",\"doi\":\"10.1109/POLYTR.2002.1020205\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Liquid crystalline polymer (LCP) is expected to be used for the lamination of electronic circuit boards because of its excellent mechanical and electric properties, such as a low dielectric constant and dimensional stability. However, it has not been widely used yet due to the weak interaction between LCP and Cu. Roughened surfaces of Cu foil that could deteriorate the electrical property are being used in conventional lamination process in order to improve the bonding strength. Surface activated bonding (SAB) of Cu/LCP based on a surface cleaning process by physical bombardment in vacuum has been performed to achieve the strong bonding. A peel strength of 800/spl sim/900 g/cm of the laminate prepared by SAB process is achieved, and the surface roughness of the interface between LCP and Cu is controlled to be less than 100 nm. In this experiment, additional treatment including Cu deposition on LCP and annealing after bonding is applied in order to obtain strong bonding. The effects of these treatments are investigated with the discussion of bonding mechanism.\",\"PeriodicalId\":166602,\"journal\":{\"name\":\"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"15\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/POLYTR.2002.1020205\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/POLYTR.2002.1020205","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15

摘要

液晶聚合物(LCP)由于具有低介电常数和尺寸稳定性等优异的机械和电气性能,有望用于电子电路板的层压。但由于LCP与Cu之间的弱相互作用,尚未得到广泛应用。为了提高铜箔的粘接强度,在传统的层压工艺中采用了表面粗糙处理的方法。采用真空物理轰击表面清洗工艺制备了Cu/LCP表面活化键合(SAB),实现了Cu/LCP的强键合。采用SAB工艺制备的层压板剥离强度达到800/spl sim/900 g/cm, LCP - Cu界面表面粗糙度控制在100 nm以下。在本实验中,为了获得牢固的键合,在LCP上进行了Cu沉积和键合后的退火处理。研究了这些处理的效果,并讨论了键合机理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A lamination technique of LCP/Cu for electronic packaging
Liquid crystalline polymer (LCP) is expected to be used for the lamination of electronic circuit boards because of its excellent mechanical and electric properties, such as a low dielectric constant and dimensional stability. However, it has not been widely used yet due to the weak interaction between LCP and Cu. Roughened surfaces of Cu foil that could deteriorate the electrical property are being used in conventional lamination process in order to improve the bonding strength. Surface activated bonding (SAB) of Cu/LCP based on a surface cleaning process by physical bombardment in vacuum has been performed to achieve the strong bonding. A peel strength of 800/spl sim/900 g/cm of the laminate prepared by SAB process is achieved, and the surface roughness of the interface between LCP and Cu is controlled to be less than 100 nm. In this experiment, additional treatment including Cu deposition on LCP and annealing after bonding is applied in order to obtain strong bonding. The effects of these treatments are investigated with the discussion of bonding mechanism.
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