用于超细间距互连的新型无铅纳米级不导电胶(NCA)

Yi Li, K. Moon, C. Wong
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引用次数: 3

摘要

近年来,非导电胶粘剂(NCA)作为无铅互连技术,因其具有良好的间距性能和较低的成本而受到越来越多的研究。NCA通常不需要导电性的分蘖,但需要相对较高的压力来结合IC芯片和基片之间的热量。在键合过程中,加热和加压一段时间,IC凸点和基板键合垫的两个表面之间的直接物理接触可以用NCA树脂固化/固化。底部和顶部衬垫/电极的接触,通过它们的起伏(代表不均匀的键合衬垫表面)表面结构,导致NCA接头的导电。为了制造导电的NCA接头,需要相对较高的压力和高度的聚合物树脂固化。介绍了一种新型无铅纳米级NCA互连材料,该材料采用微量原位形成的纳米导电填料。这些均匀分布的纳米级导电填料在环氧树脂中原位形成,并在聚合物基体中分散良好。因此,新型NCA接头在较低的键合压力下形成,并在不牺牲NCA的细间距优势的情况下表现出改进的电气性能。这种显著的改善是由于纳米导电填料增强了界面性能,有助于电子的隧穿和电流的流动
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Novel lead free nanoscale nonconductive adhesive (NCA) for ultra-fine pitch interconnect applications
Recently, non-conductive adhesive (NCA) bonding technology has attracted increasingly research interests as lead-free interconnect due to the fine pitch capability and low cost. The NCA usually requires no conductive tillers, but needs a relatively high pressure for bonding between the IC chip and the substrate coupled with heat. During bonding, the heat and pressure are applied for some time and the direct physical contact between the two surfaces of the IC bump and the substrate bond pad can be made with NCA resin curing/solidification. Contact of bottom and top pads/electrodes, via their up-and-hill (represents the uneven bond pads surfaces) surface structures, leads to the electrical conduction of NCA joints. In order to create the electrically conductive NCA joints, relatively high pressure and high degrees of the solidification of the polymer resin are required. This paper introduces a novel lead-free nanoscale NCA interconnect material with trace amount of in-situ formed nanoconductive fillers. These uniformly distributed nanosized conductive fillers were in-situ formed in the epoxy resin and were well dispersed within the polymeric matrix. As such, the novel NCA joints were formed with lower bonding pressures and exhibited an improved electrical performance without sacrificing the fine pitch advantages of NCAs. The dramatic improvement was attributed to the enhanced interface properties by the nanoconductive fillers, which assisted the electrons tunneling and current flow
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