三维集成流程的软件开发

2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT) Pub Date : 2012-11-01 DOI:10.1109/IEMT.2012.6521773

A. Grunewald, K. Hahn, R. Bruck

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引用次数: 4

摘要

近年来，3D集成电路设计和制造不断涌现。除了如何垂直整合两个或多个模具的各种可能性之外，还必须考虑许多方面，包括成本，设计和技术选择。因此，本文提出了一种利用设计技术和工艺技术相互依赖的设计方法和软件实现，以提供一个可制造的集成流程。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Software-based development of 3D integration flows

In recent years 3D IC design and manufacturing is continuously emerging. Along with the variety of possibilities on how to vertically integrate two or more dies, many aspects including cost, design and choice of technology must be considered. Therefore a design methodology and software implementation is presented in this paper which makes use of the mutual dependency of design and process technology in order to provide a manufacturable integration flow.

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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)

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