高性能HDTV CCD图像传感器的新型分流布线技术

K. Orihara, K. Minami, T. Nakano, K. Hatano, M. Furumiya, N. Mutoh, M. Ohbo, Y. Hokari
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引用次数: 1

摘要

开发了用于高清电视FIT-CCD图像传感器的新型分流布线技术。它们包括钨直接并联布线结构。同时对钨制分流线和铝制母线进行了全新布局。利用这些技术制作了1英寸格式的2M像素FIT-CCD图像传感器。在1 MHz帧移频率下实现了低于-110 dB的低涂抹水平。此外,在1.4 MHz帧移频率下,获得了1.2*10/sup 5/电子电荷处理能力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
New shunt wiring technologies for high performance HDTV CCD image sensors
New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.<>
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