集成银/银cl基准电极制备过程中表征银氯化过程的测试结构

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2019-03-01 DOI:10.1109/ICMTS.2019.8730966

C. Dunare, J. Marland, E. Blair, A. Tsiamis, F. Moorel, J. Terry, Anthony J. Walton, Stewart Smith

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引用次数: 4

摘要

为制造微型集成电化学传感器的参考电极，需要稳健且可重复的工艺。其中一种方法是通过对薄膜银层进行化学氯化处理来生产“银/氯化银”(Ag/Agel)电极。本文提出了测试结构，它可以电表征过程，以帮助过程开发和在线控制的氯化过程。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

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2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

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